HIMMERLICH, Marcel, Institute of Physics, Institute of Micro- and Nanotechnologies MacroNano®, Technische Universität Ilmenau, ALLEMAGNE
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La 1ère Ecole d’Automne sur les Matériaux Emergents(EAME) - Communications générales
Morphological and X-Ray Photoelectron Spectroscopy Characterization of Al2O3 and Al:ZnO Coated Black Silicon (100) by Atomic Layer Deposition
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