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With continuous development of optical technology, more and more optical components are used in complex system related to civil, military, space and other fields, so improving the ultra-precision grinding, lapping, and polishing are most critical factors. In this study, a comparison between chemical polishing by centrifugation (spin polishing) with the aid of HF based- solution and chemo-mechanical polishing (CMP) using acidic diamond slurry of two types of glasses (flint and crown) was investigated. Dissolution rate, roughness and optical transmission were analysed during this process, the results reveal that the process of chemical polishing by centrifugation is more effective than chemo-mechanical polishing (CMP) for its capacity to remove or reduce surface and subsurface defects (SSD); the results also show that the polishing time of the spin polishing technique is reduced. Implication of the results and future research directions are also presented in this work.