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Structural and microstructural properties of Al-doped ZnO thin films deposited on silicon substrate by sol gel method
Last modified: 2018-07-23
Abstract
We have deposited aluminium-doped zinc oxide (ZnO: Al) thin films via dip-coating technique onto silicon substrate (111). Then we have characterized them by X-ray diffraction, scanning electron microscopy (SEM), atomic force microscopy (AFM). It is found that all the thin films are polycrystalline and it have a preferential c-axis orientation along the (0 0 2) plane. SEM and AFM have provided the information on morphology of these films where the size grain and average surface roughness (rms) depend on the number of layers. All the results will be discussed and correlated.